Calibration of a Mobility Model for Quartermicron Cmos Devices

نویسندگان

  • T. Grasser
  • S. Selberherr
چکیده

We present the calibration of a mobility model for a 0.25μm CMOS technology using response surface methodology. For this process several measurements for different gate lengths (0.2μm 4.0μm) were made. Care was taken to eliminate the statistical variations typical to sub-micron devices by measuring several chips on the the same wafer and taking an average sample.

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تاریخ انتشار 2014